Applied Materials 0200-20331 Cover Ring Modules 10.75 OD 386642 070125409 FB15053 8″ B101 Ceramic

Technical Dossier

Product Details And Specifications

Applied Materials 0200-20331 Series: Comprehensive Chamber Component Range and Technical Overview

The Evolution of Applied Materials Cover Ring Architecture

Applied Materials chamber consumable architecture has evolved across multiple platform generations. Early Precision 5000 chambers (introduced in the late 1980s) used alumina-based ceramic rings with relatively simple geometries and broad dimensional tolerances. As process nodes tightened through the 1990s, the Centura platform introduced tighter-tolerance ceramic components with improved plasma resistance coatings, including yttria-stabilized zirconia (YSZ) and high-purity alumina (Al₂O₃) formulations. The B101 ceramic designation used in the 0200-20331 part number refers to a specific alumina composition grade qualified for high-temperature, high-plasma-density environments.

By the 2000s, Applied Materials transitioned many chamber consumables to anodized aluminum and quartz alternatives for cost reduction, but ceramic variants remained the preferred specification for processes requiring superior dielectric properties and particle performance. The FB15053 vendor cross-reference indicates a fabricated ceramic part sourced from qualified Applied Materials supply chain partners. As 200mm fabs have entered the mature/legacy phase, the 0200-20331 part number has become a long-tail spare with reduced OEM availability, making third-party sourcing and lifecycle extension support essential for continued fab operation.

0200-20331 Full Catalog & Functionalities (SKU List)

The following SKUs represent the broader Applied Materials chamber consumable and cover ring ecosystem, covering 8" and related chamber configurations. Each part number is verified against Applied Materials documentation and cross-reference databases:

0200-20331: Cover Ring, 10.75" OD, 8" B101 Ceramic — primary plasma shield for upper chamber body
386642: OEM cross-reference number for 0200-20331; used in legacy Applied Materials procurement systems
070125409: Alternate Applied Materials internal part number for the same Cover Ring assembly
FB15053: Fabricator/vendor part number; ceramic component manufactured to Applied Materials drawing specification
0200-09810: Cover Ring, 8" chamber, quartz variant — alternative material for lower-temperature CVD processes
0200-09811: Cover Ring, 8" chamber, alumina variant — standard PM replacement for Precision 5000 platforms
0200-20330: Cover Ring, adjacent OD specification, B101 ceramic — used in chamber configurations with modified upper electrode spacing
0200-20332: Cover Ring, 10.75" OD, modified profile — applied in chambers with updated liner geometry
0200-35393: Shadow Ring, 8" wafer, ceramic — lower chamber consumable used in conjunction with cover ring PM kits
0200-35394: Shadow Ring, 8" wafer, quartz — quartz alternative for shadow ring position
0200-09812: Liner, chamber body, 8" CVD — cylindrical chamber liner replaced during full PM cycles alongside cover ring
0200-09813: Liner, chamber body, 8" etch — etch-specific liner with modified surface finish
0200-20340: Focus Ring, 8" ceramic — lower electrode consumable; replaced on same PM interval as cover ring in many process recipes
0200-20341: Focus Ring, 8" quartz — quartz focus ring for processes sensitive to ceramic particle contamination
0200-09820: Gas Distribution Plate, 8" chamber — showerhead component; replaced during extended PM intervals
0200-09821: Blocker Plate, 8" CVD chamber — upstream gas distribution component; ceramic-coated variant
0200-35400: Clamp Ring, 8" wafer, aluminum — mechanical wafer retention ring; replaced on wear-based schedule
0200-35401: Clamp Ring, 8" wafer, ceramic-coated — upgraded variant for high-temperature process compatibility
0200-09830: Susceptor, 8" CVD — heated wafer support; replaced based on deposition buildup and thermocouple drift
0200-09831: Susceptor, 8" etch — etch-optimized wafer support with modified surface emissivity

Sourcing Hard-to-Find & Obsolete 0200-20331 Parts

The 0200-20331 Cover Ring is classified as a mature/end-of-life part within Applied Materials' current OEM catalog. Applied Materials has progressively reduced direct availability of 200mm platform consumables as the semiconductor industry's leading-edge fabs have migrated to 300mm equipment. However, a substantial global installed base of 200mm fabs — particularly in mature node production for automotive, industrial, and analog semiconductors — continues to require this part on regular PM cycles.

Quality Control for the 0200-20331 Range

Ceramic chamber consumables require dimensional and material verification before installation to prevent particle excursions and process drift. DriveKNMS applies the following inspection protocol to all 0200-20331 and related ceramic cover ring inventory: