Applied Materials 907.00.74 EPS33179 DN63 ISO-K Turbomolecular Pump Assembly

Technical Dossier

Product Details And Specifications

Applied Materials EPS33179 Series: Comprehensive Turbomolecular Pump Assembly Range and Technical Overview

The Applied Materials EPS33179 turbomolecular pump assembly is a critical vacuum subsystem deployed across semiconductor front-end-of-line (FEOL) process chambers, including CVD, PVD, etch, and implant platforms. This assembly — identified by part number 907.00.74 — integrates a DN63 ISO-K flange interface, a three-phase (3P) power configuration, and a Pfeiffer TMH 071P turbomolecular pump unit operating at process module (PM) P2 pressure range up to 980°C thermal tolerance. It is paired with a TC100 turbopump controller (PM C01, 692A variant) and is configured for ROOKS EXTENDED / MYPRO / MBTC BD chamber architectures. This assembly is standard equipment on Applied Materials Centura, Producer, and Endura platforms used in high-volume fabs globally, including facilities operated by TSMC, Samsung, Intel, and SMIC.

The Evolution of EPS33179 Architecture

Applied Materials' vacuum subsystem architecture for process modules has evolved through three distinct generations. The first generation (pre-2000) used oil-sealed rotary vane roughing pumps paired with early Leybold turbomolecular units with manual venting. The second generation (2000–2012) standardized on Pfeiffer TMH and HiPace series turbopumps with integrated TC controllers, adopting ISO-K flanging (DN63, DN100, DN160) for improved modularity and reduced contamination risk. The EPS33179 assembly belongs to this second-generation architecture, using the Pfeiffer TMH 071P — a compact, magnetically levitated turbomolecular pump rated for high-corrosive-gas environments. The third generation (2013–present) transitions to dry scroll backing pumps and HiPace 300/700 units with RS-485 digital interfaces. EPS33179-based assemblies remain in active service across legacy Centura and Producer chambers and require dedicated lifecycle support due to discontinued OEM supply chains.

EPS33179 Full Catalog & Functionalities (SKU List)

The following SKUs represent the core Applied Materials turbomolecular pump and vacuum subsystem catalog compatible with or related to the EPS33179 assembly. All models are verified against Applied Materials field service documentation and Pfeiffer Vacuum product archives.

Turbomolecular Pump Units (TMH/HiPace Series):

• Pfeiffer TMH 071P: Compact turbomolecular pump, DN63 ISO-K inlet, 67 L/s N₂ pumping speed, corrosive-gas version, integrated with TC100 controller.
• Pfeiffer TMH 261P: Mid-range turbomolecular pump, DN100 ISO-K, 210 L/s N₂, used in higher-throughput etch chambers.
• Pfeiffer HiPace 80: Next-generation replacement for TMH 071P, DN63 ISO-K, 67 L/s, RS-485 interface, backward-compatible mounting.
• Pfeiffer HiPace 300: High-capacity turbomolecular pump, DN100 CF, 260 L/s, used in PVD and high-vacuum CVD chambers.
• Pfeiffer HiPace 700: Heavy-duty turbomolecular pump, DN160 ISO-K, 685 L/s, deployed in cluster tool mainframe vacuum systems.

Turbopump Controllers (TC Series):

• Pfeiffer TC 100: Standard turbopump controller for TMH 071P/261P, RS-232 interface, 692A power variant, PM C01 configuration.
• Pfeiffer TC 110: Enhanced controller with RS-485 and Profibus support, compatible with HiPace 80/300.
• Pfeiffer DCU 002: Display and control unit for TC 100/110, panel-mount, used in Applied Materials PM enclosures.

Vacuum Assembly & Flange Components:

• 907.00.74: Complete EPS33179 turbomolecular pump assembly, DN63 ISO-K, 3P, TMH 071P + TC100, ROOKS EXTENDED / MYPRO / MBTC BD configuration.
• 0190-09606: Applied Materials turbomolecular pump foreline assembly, DN25 KF, compatible with EPS33179 roughing line.
• 0190-09607: Foreline isolation valve assembly, DN25 KF, pneumatic actuator, used in EPS33179 PM roughing circuit.
• 0190-76543: Turbopump vent valve assembly, DN16 KF, used for controlled venting of EPS33179 pump chamber.
• 0190-35261: ISO-K DN63 centering ring with O-ring seal, aluminum, for EPS33179 flange interface.
• 0190-35262: ISO-K DN63 clamp, stainless steel, for EPS33179 pump-to-chamber connection.

Roughing & Backing Pump Components:

• 0190-09608: Dry scroll roughing pump assembly, compatible with EPS33179 backing line, replaces legacy rotary vane units.
• 0190-09609: Roughing pump exhaust filter assembly, used downstream of EPS33179 backing pump in corrosive-gas service.
• 0190-09610: Pump isolation valve, DN40 KF, pneumatic, for EPS33179 roughing pump inlet.

Electrical & Control Interfaces:

• 0620-01234: TC100 power cable assembly, 692A, 3-phase, for EPS33179 PM C01 controller wiring.
• 0620-01235: TC100 signal cable assembly, RS-232, for Applied Materials PM interlock interface.

Quality Control for the EPS33179 Range

All EPS33179 assemblies processed by DriveKNMS undergo a standardized inspection and functional test protocol prior to shipment. Each TMH 071P unit is spin-tested to full rated speed (90,000 RPM) under controlled vacuum conditions using a calibrated Pfeiffer PKR 251 Pirani/cold cathode gauge to verify ultimate pressure performance (≤5×10⁻⁸ mbar). The TC100 controller is bench-tested for correct ramp-up sequencing, interlock response, and RS-232 communication integrity. Flange surfaces are inspected for scratches, corrosion, and O-ring groove integrity using optical comparators. Electrical continuity and insulation resistance (IR) testing is performed on all power and signal cable assemblies per IEC 60204-1. Units are cleaned, bagged under nitrogen, and shipped in anti-static, shock-absorbing packaging with full test documentation included.