Applied Materials AL203 0200-09429 V10PFT03DX2 853-200977-002 Window AL203 Coated BWCVD

Technical Dossier

Product Details And Specifications

Applied Materials AL203 Series Technical Notes

The Evolution of AL203 Architecture

Applied Materials introduced aluminum oxide (Al₂O₃) coated chamber components as a response to accelerating plasma erosion rates in high-density plasma CVD and ALD processes during the late 1990s and early 2000s. Early-generation AL203 parts were produced via thermal spray coating on aluminum substrates, offering moderate plasma resistance suitable for oxide and nitride deposition. As process chemistries became more aggressive — particularly with the adoption of high-k dielectrics (HfO₂, Al₂O₃ ALD) and fluorine-based cleans — Applied Materials transitioned to denser, higher-purity Al₂O₃ coatings applied via BWCVD (Blanket Wafer CVD) and advanced plasma spray techniques.

The V10PFT03DX2 variant designation indicates a specific platform-generation fit, with dimensional tolerances and coating thickness specifications matched to Producer GT and Centura chamber configurations. The 853-200977-002 assembly number cross-references the Applied Materials internal BOM, confirming this is a second-revision assembly with updated coating uniformity specifications. Compatibility considerations are critical: AL203 windows are not interchangeable across chamber generations without engineering review, as RF coupling characteristics and thermal expansion coefficients differ between platform variants. End-of-life for original OEM supply of several AL203 sub-variants has been confirmed, making third-party sourcing and refurbishment the primary supply channel for installed base maintenance.

AL203 Full Catalog & Functionalities (SKU List)

The following SKUs represent the core AL203 series component range across Applied Materials CVD and etch platforms. Each part is classified by function:

Process Windows & Dielectric Liners

• 0200-09429 / V10PFT03DX2 / 853-200977-002: Window, AL203 coated, BWCVD; plasma-facing dielectric window for Producer/Centura CVD chambers.
• 0200-09430: Window, AL203 coated, 200mm chamber variant; alternate dimensional spec for high-density plasma chambers.
• 0200-09431: Window, AL203 coated, 300mm platform; extended diameter for Centura 300mm process modules.
• 0200-35391: Liner, AL203 coated, chamber body; cylindrical liner protecting chamber sidewalls in fluorine-chemistry environments.
• 0200-35392: Liner, AL203 coated, upper; top-section chamber liner for Producer GT modules.
• 0200-40123: Dome, AL203 coated, quartz substrate; upper dome assembly with AL203 overcoat for plasma uniformity.

Showerhead & Gas Distribution Components

• 0200-09500: Showerhead, AL203 coated, 200mm; gas distribution faceplate with AL203 plasma-resistant coating.
• 0200-09501: Showerhead, AL203 coated, 300mm; high-uniformity gas distribution for 300mm Centura chambers.
• 0200-09502: Blocker plate, AL203 coated; secondary gas distribution element upstream of showerhead.
• 0200-09503: Baffle, AL203 coated; flow-conditioning insert for uniform precursor distribution.

Edge Ring & Focus Ring Components

• 0200-20100: Edge ring, AL203 coated, 200mm; wafer edge confinement ring for etch uniformity control.
• 0200-20101: Focus ring, AL203 coated, 300mm; electrostatic chuck peripheral ring for plasma confinement.
• 0200-20102: Confinement ring, AL203 coated; plasma confinement assembly for Producer HT modules.

Chamber Body & Structural Components

• 0200-30010: Chamber body insert, AL203 coated; structural insert protecting chamber body from plasma erosion.
• 0200-30011: Slit valve door, AL203 coated; wafer transfer port door with plasma-resistant coating.
• 0200-30012: Pumping plate, AL203 coated; exhaust-side plate controlling gas flow symmetry in CVD chambers.
• 0200-30013: Lid, AL203 coated, chamber top; upper chamber closure with integrated AL203 coating for process isolation.
• 0200-30014: Susceptor shield, AL203 coated; protective shroud around wafer susceptor assembly.

Quality Control for the AL203 Range

AL203 coated components present specific inspection challenges due to the thin-film nature of the aluminum oxide coating and the precision dimensional tolerances required for chamber fit. DriveKNMS applies a multi-stage quality control protocol to all AL203 parts: