Applied Materials C1807 Simple Cathode Modules C1807 / 0200-36034 / 0051-02153 / ABX-X284

Technical Dossier

Product Details And Specifications

Applied Materials C1807 Series Technical Notes

The Evolution of C1807 Architecture

The C1807 cathode architecture traces its lineage to Applied Materials' early magnetron sputtering designs of the late 1980s and early 1990s, when the Endura platform was introduced as a multi-chamber, cluster-tool PVD system. Early cathode assemblies in this lineage used fixed magnet arrays and required full chamber venting for replacement. Subsequent revisions introduced rotating magnet packages to improve target utilization uniformity, extending target life from approximately 300 kWh to over 1,000 kWh in mature configurations.

The C1807 sub-assembly numbering (e.g., 0200-36034, 0051-02153, ABX-X284) reflects Applied Materials' internal part revision and configuration management system. The 0200-XXXXX prefix typically denotes a top-level assembly or kit, while 0051-XXXXX numbers reference sub-components such as the cathode body, dark space shield, or magnet housing. ABX-prefixed part numbers are associated with specific chamber configurations or customer-specific build variants. Compatibility between revisions must be verified against the specific Endura or Centura chamber generation (e.g., SL, XP, HP, or UHP configurations) before installation.

As the semiconductor industry transitioned to 300mm wafer processing, the C1807 series was adapted with larger target diameters and revised cooling channel geometries to manage increased power densities. Legacy 200mm configurations remain in active production at mature nodes (28nm and above) and in compound semiconductor fabs, sustaining demand for older C1807 sub-assembly variants that are no longer manufactured by Applied Materials.

C1807 Full Catalog & Functionalities (SKU List)

The following SKUs represent verified components within or directly associated with the Applied Materials C1807 cathode assembly ecosystem. Each entry reflects a distinct functional role within the PVD chamber assembly:

C1807: Top-level cathode assembly designation for Endura/Centura PVD chambers.
0200-36034: Cathode body assembly, complete with cooling manifold and target mounting interface.
0051-02153: Cathode sub-assembly component; magnet housing or dark space shield sub-unit.
ABX-X284: Customer/configuration-specific cathode variant; verify chamber generation before ordering.
0200-09585: Dark space shield assembly, compatible with standard Endura PVD cathode configurations.
0051-09056: Cathode magnet array sub-assembly; rotating magnet package for improved target uniformity.
0200-40067: Cathode cooling plate assembly; direct replacement for high-power process configurations.
0051-07521: Cathode body O-ring kit; chamber seal maintenance set for C1807-series cathodes.
0200-35892: Full cathode replacement kit including body, shield, and hardware for scheduled PM cycles.
0051-11034: Cathode adapter flange; interfaces C1807 assembly to Endura SL chamber lid.
0200-42198: Cathode shield retaining ring; stainless steel, for standard and UHP chamber variants.
0051-13872: Cathode power feed-through assembly; rated for DC magnetron sputtering applications.
0200-38541: Cathode target clamp ring; secures sputtering target to cathode body during process.
0051-06347: Cathode water block assembly; precision-machined cooling interface for high-duty-cycle operation.
0200-44012: Cathode assembly rebuild kit; includes all wear components for full refurbishment to OEM specification.
0051-15209: Cathode insulator sleeve; ceramic, isolates cathode body from grounded chamber structure.
0200-31076: Cathode magnet housing cover; protects rotating magnet assembly from process environment.
0051-08834: Cathode RF match network interface bracket; for RF-biased PVD process configurations.

Quality Control for the C1807 Range

C1807 cathode assemblies present specific quality verification challenges due to the precision tolerances of the cooling channel geometry, the integrity of the vacuum-side O-ring sealing surfaces, and the electrical isolation of the cathode body from the grounded chamber structure. DriveKNMS applies the following inspection protocol to all C1807 units processed through its facility:

Dimensional verification of target mounting surface flatness (tolerance: ±0.05mm) using calibrated CMM equipment. Pressure testing of internal cooling channels at 1.5× operating pressure (typically 90 PSI) with helium leak detection to confirm zero cross-contamination risk. High-potential (hipot) testing of cathode insulator sleeve at 2,500V DC to verify dielectric integrity. Visual and borescope inspection of all vacuum-wetted surfaces for contamination, pitting, or arc damage. Functional verification of rotating magnet assembly rotation torque and bearing condition where applicable. Each unit is issued a traceable inspection record prior to shipment.