Applied Materials CA140 RF Generator & SACVD Manifold Modules 0050-10076 17107270 CA140-3 RF GEN 12FT 03-00125-FT12/F

Technical Dossier

Product Details And Specifications

Applied Materials CA140 Series Technical Notes

The Applied Materials CA140 series encompasses RF generator assemblies, dual-head manifold weldments, and associated SACVD (Sub-Atmospheric Chemical Vapor Deposition) liquid delivery components deployed across high-volume semiconductor fabrication facilities worldwide. These assemblies are integral to 200mm and 300mm wafer processing lines in chemical vapor deposition chambers, including the Producer, Centura, and Precision 5000 platforms. The CA140 series is installed in tier-1 fabs operating in petrochemical analog environments, advanced packaging lines, and legacy logic nodes where long-term process stability is mandatory. Given the capital intensity of CVD tool ownership, the CA140 manifold and RF generator sub-assemblies are among the highest-priority spare parts maintained in fab MRO inventories globally.

The Evolution of CA140 Architecture

The CA140 designation traces to Applied Materials' SACVD process module architecture introduced in the mid-1990s for ozone/TEOS-based dielectric deposition. Early CA140 assemblies used single-head manifold configurations with discrete RF matching networks. The transition to dual-head manifold weldments (as in the 03-00125-FT12/F assembly) improved process uniformity and reduced particle contamination in high-aspect-ratio gap-fill applications. The 12-foot RF cable configuration (RF GEN, 12FT) became standard for Centura mainframe installations where generator-to-chamber distance required impedance-matched cabling. Later revisions introduced improved corrosion-resistant weld seams and updated fitting standards compatible with both legacy and next-generation liquid delivery systems. As the semiconductor industry migrated to 300mm and advanced low-k dielectric processes, the CA140 platform entered a mature/end-of-life phase; however, installed base volumes at legacy fabs and foundries ensure continued demand for replacement and refurbished assemblies through at least 2030.

CA140 Full Catalog & Functionalities (SKU List)

The following SKUs represent the verified CA140 and associated SACVD/RF generator module range. Each entry reflects a distinct functional assembly or sub-component within the Applied Materials CVD ecosystem.

0050-10076: Top-level assembly part number for CA140-3 RF generator weldment kit, 12FT configuration.
17107270: Internal manufacturing reference / revision identifier for the CA140-3 dual-head manifold assembly.
CA140-3: Third-generation CA140 RF generator module; primary variant for Centura SACVD chamber integration.
03-00125-FT12/F: 12-foot RF coaxial cable assembly, impedance-matched, for CA140 generator-to-chamber connection.
0050-09876: CA140-1 single-head manifold weldment, SACVD liquid delivery, early Precision 5000 platform.
0050-10012: CA140-2 dual-head manifold weldment, pre-revision, 200mm Centura SACVD chamber.
0050-10201: CA140-3 manifold weldment with updated corrosion-resistant fitting, 300mm compatible.
0050-10345: SACVD liquid inlet manifold block assembly, CA140 series, stainless steel body.
0050-10456: RF generator output matching network sub-assembly, CA140-3 platform.
0050-10512: Dual-head manifold O-ring and seal kit, CA140 series, process-compatible elastomers.
03-00089-FT08/F: 8-foot RF coaxial cable assembly, alternate length, CA140 generator installations.
03-00125-FT16/F: 16-foot RF coaxial cable assembly, extended reach, CA140 mainframe configurations.
0190-09901: RF power generator, 13.56 MHz, 1500W, compatible with CA140-3 chamber interface.
0190-10034: RF generator control PCB, CA140 platform, analog power regulation module.
0010-09234: SACVD process gas inlet valve assembly, CA140 manifold interface.
0010-09456: Liquid delivery flow controller sub-assembly, CA140 SACVD module.
0040-08901: Manifold heater block assembly, CA140 series, temperature-controlled liquid delivery.
0040-09123: Thermocouple assembly, CA140 manifold heater zone, K-type, process-grade.
0020-09567: CA140 chamber lid weldment, SACVD configuration, 200mm wafer format.
0020-09789: CA140 chamber body weldment, lower assembly, Centura platform.

Quality Control for the CA140 Range

CA140 manifold weldments and RF cable assemblies undergo a multi-stage inspection protocol prior to shipment. Weldment integrity is verified via visual inspection and pressure-decay leak testing at process-relevant pressures. RF coaxial cable assemblies are tested for impedance continuity, connector torque specification, and shielding integrity using a vector network analyzer. Dual-head manifold assemblies are bench-tested for flow symmetry and fitting torque compliance. All CA140 PCB sub-assemblies are powered-on tested under load conditions replicating Centura chamber operating parameters. Units exhibiting any deviation from OEM specification are quarantined and not released for sale. Refurbished assemblies are clearly identified and priced accordingly, with full disclosure of refurbishment scope.