Applied Materials DGF Enclosure Assembly 0020-28293 / 0020-22879 / 17-326448C01 / 710-031325-002 / 810-031325-002

Technical Dossier

Product Details And Specifications

Applied Materials DGF Enclosure Series Technical Notes

Applied Materials (AMAT) is the world's largest supplier of semiconductor capital equipment, with its chemical vapor deposition (CVD), diffusion, and etch platforms installed across leading fabs in Taiwan, South Korea, Japan, the United States, and China. The DGF (Diffusion Gas Flow) Enclosure assembly — referenced under part numbers 0020-28293, 0020-22879, 17-326448C01, 710-031325-002, and 810-031325-002 — is a structural and functional sub-assembly used within AMAT's thermal processing and gas delivery systems. These enclosures house gas flow control components, wiring harnesses, and interface boards that are integral to process repeatability and chamber isolation.

The Evolution of Applied Materials DGF Architecture

Applied Materials' gas delivery and enclosure architecture has evolved across multiple platform generations. Early systems such as the Precision 5000 and Centura platforms (introduced in the late 1980s and 1990s) used modular enclosure designs that allowed field replacement of individual sub-assemblies without full chamber removal. This philosophy carried forward into the Producer, Endura, and Centura XT platforms of the 2000s and 2010s.

The DGF enclosure family spans multiple generations of these platforms. Cross-generation compatibility is not guaranteed — enclosure dimensions, connector pinouts, and gas fitting standards differ between platform revisions. Part numbers such as 17-326448C01 indicate a revision-controlled assembly (revision C, iteration 01), meaning earlier revisions (A, B) may not be drop-in compatible without engineering review. Fabs operating mixed-generation tool fleets must maintain revision-specific spare inventories to avoid costly mis-installation events.

As AMAT transitions customers toward newer platforms, legacy DGF enclosure assemblies are progressively removed from active OEM support. This creates a structural supply gap that third-party specialists like DriveKNMS are positioned to fill.

Applied Materials DGF Enclosure – Full Catalog & Related Part Numbers (SKU Reference List)

The following part numbers are associated with the DGF enclosure assembly family and related gas delivery sub-assemblies within Applied Materials thermal and CVD platforms. Each entry reflects a distinct configuration or revision:

• 0020-28293: Primary DGF enclosure assembly – main structural housing for gas flow control components
• 0020-22879: DGF enclosure sub-assembly – secondary interface or mounting bracket configuration
• 17-326448C01: Revision C enclosure wiring/interface assembly – revision-controlled harness integration
• 710-031325-002: Enclosure panel or cover assembly – variant 002 configuration for specific platform fit
• 810-031325-002: Enclosure base or chassis assembly – paired with 710-031325-002 in full assembly builds
• 0020-09429: Gas line enclosure bracket – common companion part in DGF module builds
• 0020-11698: Enclosure mounting hardware kit – used across Centura and Producer platform enclosures
• 0020-36985: DGF panel wiring harness – internal signal routing for enclosure-mounted boards
• 0020-40174: Gas delivery enclosure cover – protective outer panel for DGF sub-system
• 0020-44512: Enclosure interface PCB assembly – signal conditioning board mounted within DGF enclosure
• 0040-76439: MFC (Mass Flow Controller) mounting bracket – installed within DGF enclosure frame
• 0040-09987: Gas panel enclosure door assembly – access panel for field maintenance
• 0050-92737: DGF enclosure pneumatic fitting block – gas line termination within enclosure
• 0190-09887: Enclosure EMI shielding insert – RF isolation component for sensitive process modules
• 3700-01094: Enclosure latch and seal kit – environmental sealing hardware for DGF housing
• 0020-C0514: Centura platform enclosure assembly – generation-specific DGF housing variant

Note: Part numbers marked with revision codes (e.g., C01, -002) are revision-specific. Confirm revision compatibility with your tool's engineering documentation before ordering.

Sourcing Hard-to-Find & Obsolete Applied Materials DGF Enclosure Parts

Applied Materials manages an extensive installed base across fabs that have operated the same tool platforms for 10–20 years. When a platform reaches end-of-life support, OEM spare part availability drops sharply — but the tools themselves remain in production use, often running critical process steps that cannot be easily migrated to newer equipment without significant process re-qualification costs.

DriveKNMS maintains a dedicated inventory of Applied Materials mechanical and electromechanical sub-assemblies, including DGF enclosure assemblies across multiple platform generations. Our sourcing network covers:

• Decommissioned fab equipment buyouts — tools retired from leading fabs in Taiwan, Korea, and Japan
• Verified surplus from authorized AMAT service partners
• Cross-referenced part number matching for revision-controlled assemblies

Quality Control for the DGF Enclosure Range

Mechanical and electromechanical enclosure assemblies sourced outside OEM channels require structured inspection before installation in a live process environment. DriveKNMS applies a 5-stage verification protocol to all DGF enclosure assemblies:

All assemblies are shipped in anti-static, moisture-barrier packaging with full inspection documentation included.