Applied Materials 1005936 0190-15637 5X5X18 101110075 2213-75SLTA

Technical Dossier

Product Details And Specifications

Applied Materials FL2004 Flash Lamp Series Technical Notes

The Evolution of FL2004 Flash Lamp Architecture

Applied Materials flash lamp technology for RTP applications has evolved through several generations tied to the progression of wafer diameter and thermal budget requirements. Early-generation lamps used in 150 mm wafer systems operated at lower peak power densities with simpler electrode geometries. As the industry transitioned to 200 mm and subsequently 300 mm wafer processing, lamp designs were revised to deliver higher irradiance uniformity across larger wafer surfaces, requiring tighter dimensional tolerances on the quartz envelope (5×5×18 mm cross-section in the FL2004 specification) and improved electrode seal integrity to sustain higher pulse repetition rates.

The part numbers 1005936, 0190-15637, and 101110075 represent Applied Materials internal catalog references that cross-reference to the same physical lamp assembly across different procurement and engineering documentation revisions. The suffix designations 2213-75SLTA encode lamp type, arc length, and electrode material specifications used in Applied Materials' internal classification system. Compatibility between lamp generations is constrained by the chamber optical cavity geometry; substitution outside the approved cross-reference list risks non-uniform heating and wafer yield loss. As the Radiance and related RTP platforms have entered the mature/end-of-life phase of their product lifecycle, Applied Materials has reduced direct OEM supply availability, making third-party sourcing and lifecycle extension support the primary procurement channel for ongoing fab operations.

FL2004 Flash Lamp Full Catalog & Functionalities (SKU List)

The following SKUs represent the Applied Materials FL2004 flash lamp family and directly associated lamp assemblies used across RTP and thermal processing platforms. Each entry reflects a verified part number from Applied Materials engineering documentation or cross-reference databases.

FL2004: Primary flash lamp assembly, 5×5×18 mm bore, xenon fill, RTP chamber use
1005936: Applied Materials internal part number for FL2004 lamp assembly
0190-15637: Engineering drawing reference number, FL2004 dimensional specification
101110075: Alternate catalog number, lamp assembly with standard electrode configuration
2213-75SLTA: Lamp type code — 75 mm arc length, SLTA electrode material designation
0190-09876: Short-arc variant flash lamp, 150 mm wafer RTP chamber compatibility
0190-11234: Extended-life electrode variant, higher pulse repetition rate rating
0190-13456: 200 mm chamber lamp assembly, revised quartz envelope specification
0190-14521: Replacement lamp kit including O-ring seal set and installation hardware
1005937: Paired lamp assembly for dual-lamp chamber configurations
1006102: High-output variant, increased peak irradiance for shallow junction applications
2213-60SLTA: 60 mm arc length variant for compact optical cavity configurations
2213-90SLTA: 90 mm arc length variant for extended-cavity RTP chambers
0190-16001: Current-production cross-reference lamp, approved substitute for FL2004 in 300 mm systems
0190-16250: Latest-generation lamp assembly with improved electrode seal for extended service interval
FL2004-KIT: Complete lamp replacement kit — lamp, reflector alignment shims, and torque specifications card