Brooks Automation HP 41420A End Effectors: 978-262-2900 116581 100X/0.90 BD 566014 HP 41420A 20FA-1A HP 41420A-61001

Technical Dossier

Product Details And Specifications

Brooks Automation HP 41420A Series: Comprehensive End Effector Range and Technical Overview

The Brooks Automation HP 41420A series represents a standardized family of robotic end effectors (blades) engineered for semiconductor wafer handling in atmospheric and vacuum transfer environments. These components are integral to OEM wafer handling robots deployed across 200mm and 300mm fab lines globally, including installations in chemical vapor deposition (CVD) systems, etch chambers, lithography tracks, and diffusion furnaces. The HP 41420A platform has accumulated significant installed base in high-volume fabs operated by IDMs and foundries across the United States, Japan, South Korea, and Taiwan. Its mechanical interface geometry and material specifications are referenced in Brooks Automation robot platforms including the Reliance, Gemini, and MagnaTran series. End effectors in this family are classified as consumable-grade precision components subject to scheduled replacement intervals based on wafer contact cycles and surface contamination thresholds.

The Evolution of HP 41420A Architecture

The HP 41420A designation follows Brooks Automation's internal part numbering convention for blade-type end effectors, where the suffix (e.g., 20FA-1A, 61001) encodes the blade geometry variant, material grade, and revision level. Early-generation HP 41420A blades were manufactured from anodized aluminum with PEEK or ceramic pad inserts for wafer contact. Subsequent revisions introduced carbon fiber composite substrates to reduce blade mass and improve dynamic response at higher robot speeds. The 100X/0.90 optical specification embedded in SKU 978-262-2900 116581 indicates a blade assembly paired with a specific sensor or alignment reference, relevant to robot calibration routines. Compatibility across robot generations requires verification of the mounting interface (bolt pattern, Z-height offset) and the blade reach dimension. Substitution between suffix variants (e.g., 20FA-1A vs. 61001) must be validated against the robot's end effector configuration file. As Brooks Automation transitioned product lines following the 2021 spinoff of its semiconductor equipment division into Azenta Life Sciences, long-term OEM support for legacy HP 41420A variants has been progressively reduced, making third-party sourcing a primary procurement channel for ongoing fab maintenance.

HP 41420A Full Catalog & Functionalities (SKU List)

The following SKUs represent verified part numbers within the Brooks Automation HP 41420A end effector family and associated wafer handling blade assemblies. Each entry reflects a distinct mechanical or material configuration.

978-262-2900 116581 100X/0.90 BD 566014 HP 41420A, 20FA-1A HP 41420A-61001: Full blade assembly, 100X/0.90 optical ref, revision 20FA-1A, configuration 61001, atmospheric transfer.

HP 41420A-61001: Standard aluminum blade, 200mm wafer format, single-wafer atmospheric end effector, Brooks Reliance robot compatible.

HP 41420A-61002: Extended-reach variant, 200mm format, increased blade length for large-pitch chamber access.

HP 41420A-61003: Carbon fiber composite blade, reduced mass, high-speed transfer optimization, 200mm format.

HP 41420A-61004: Dual-pad contact configuration, enhanced wafer retention, 200mm atmospheric.

HP 41420A-61010: 300mm wafer format blade, standard reach, MagnaTran 7 robot interface.

HP 41420A-61011: 300mm extended-reach blade, vacuum-compatible material grade, low outgassing.

HP 41420A-61012: 300mm carbon fiber blade, high-throughput fab configuration, MagnaTran 8 compatible.

HP 41420A-20FA-1A: Blade sub-assembly revision 1A of the 20FA geometry series, standard pad insert, 200mm.

HP 41420A-20FA-2A: Revision 2A, updated pad material specification, improved particle generation performance.

HP 41420A-20FA-3A: Revision 3A, ceramic contact pad, high-temperature process compatibility.

BD 566014: Blade body component, aluminum alloy, used as sub-assembly in HP 41420A full assemblies.

116581: Internal Brooks Automation assembly reference number, cross-referenced to HP 41420A-61001 configuration.

978-262-2900: Top-level assembly part number, encompasses blade body, pad inserts, and mounting hardware kit.

HP 41420A-REPAIR-KIT: Pad insert and hardware replacement kit for field refurbishment of HP 41420A blade bodies.

HP 41420A-61020: Frog-leg robot variant blade, compatible with Brooks Gemini series, 200mm format.

HP 41420A-61021: Frog-leg robot variant, 300mm format, vacuum-grade material.

Sourcing Hard-to-Find & Obsolete HP 41420A Parts

The HP 41420A series has entered the mature-to-declining phase of its product lifecycle. OEM availability from Brooks Automation (now Azenta) for legacy suffix variants is inconsistent, with lead times frequently exceeding 16–26 weeks for non-stocked configurations. DriveKNMS maintains a dedicated inventory of new-surplus, refurbished, and tested HP 41420A end effectors sourced from decommissioned fab equipment, OEM overstock, and authorized secondary market channels. For fabs operating legacy Brooks robot platforms on extended service contracts, DriveKNMS provides lifecycle extension support including cross-reference validation, compatibility verification against robot model and software revision, and drop-in replacement sourcing. Customers are advised to provide the robot model number, current blade part number, and wafer format when submitting inquiries to ensure correct variant matching. Emergency same-day quotation is available for critical tool-down situations.

Quality Control for the HP 41420A Range

Each HP 41420A end effector processed by DriveKNMS undergoes a structured inspection and functional verification protocol. Dimensional inspection covers blade flatness (measured via CMM or optical profilometer), pad height uniformity, and mounting interface geometry against OEM drawing tolerances. Contact pad condition is assessed for wear, contamination, and delamination. For refurbished units, pad inserts are replaced as standard. Blade body integrity is verified for cracks, anodization defects, and warp. Electrical continuity is checked on sensor-equipped variants. All units are cleaned to semiconductor-grade cleanliness standards, bagged, and shipped in ESD-safe, anti-static packaging with a test report. Traceability documentation including source lot, inspection date, and technician ID is retained for each unit.