Swagelok SS-SCF3 UHP Inline Gas Filters | SS-SCF3-VR4-P-600 R750B11TCD2GS 750B11TCD2GG 0100-20358

Technical Dossier

Product Details And Specifications

Swagelok SS-SCF3 Series: Comprehensive Module Range and Technical Overview

The Swagelok SS-SCF3 series represents a purpose-engineered line of ultra-high-purity (UHP) inline gas filters designed for critical fluid and gas handling systems in semiconductor fabrication, chemical processing, nuclear facilities, and petroleum refining. Constructed from 316L stainless steel with electropolished internal surfaces, the SS-SCF3 series achieves surface roughness values of Ra ≤ 0.25 µm, making it the reference standard for particle-sensitive process lines. These filters are deployed globally in facilities where contamination control is a process-critical requirement, including ISO Class 1–3 cleanrooms, high-purity gas distribution panels, and analytical instrumentation manifolds.

The SS-SCF3 line supports operating pressures up to 3,000 psig (206 bar) and is rated for temperatures from –65°F to +450°F (–54°C to +232°C), covering the full envelope of industrial gas service conditions. End connections are available in VCR, VCO, and tube stub configurations, enabling direct integration into existing Swagelok and third-party UHP piping systems without adapter fittings.

The Evolution of SS-SCF3 Architecture

The SS-SCF3 series was introduced as part of Swagelok's UHP product expansion in the 1990s, responding to the semiconductor industry's transition to 200 mm and subsequently 300 mm wafer processes, which imposed increasingly stringent particle and metallic contamination limits on process gases. Early configurations used sintered stainless steel filter elements with nominal ratings of 0.5 µm and 2 µm. Subsequent revisions introduced membrane-type filter elements with absolute ratings, improving particle retention efficiency from nominal to ≥99.9999% at rated particle size.

The VCR face-seal fitting interface, standardized in the SS-SCF3-VR4 sub-series, replaced earlier compression-type connections to eliminate potential leak paths in high-purity gas service. The -P-600 pressure designation reflects the 600 psig (41.4 bar) rated working pressure of this configuration, distinguishing it from the higher-pressure -P-3000 variants used in cylinder supply applications. Compatibility with SEMI F57 and SEMI E49 standards has been maintained across all production generations, ensuring backward compatibility with legacy gas panel designs.

As the semiconductor industry has migrated toward atomic layer deposition (ALD) and extreme ultraviolet (EUV) lithography processes, the SS-SCF3 series has remained in active service due to its validated cleanliness levels and the extensive qualification data available to process engineers. The series is currently in mature production status; Swagelok continues to manufacture and support all standard configurations.

SS-SCF3 Full Catalog & Functionalities (SKU List)

The following SKUs represent the documented SS-SCF3 series configurations. Each entry reflects a distinct combination of filter element rating, end connection type, body material, and pressure class.

SS-SCF3-VR4-P-600: 316L SS body, VCR male × male, 0.003 µm abs., 600 psig rated
SS-SCF3-VR4-P-600-2: 316L SS body, VCR male × male, 0.003 µm abs., 600 psig, 2 µm element option
SS-SCF3-VR4-P-3000: VCR male × male, 0.003 µm abs., 3,000 psig high-pressure cylinder service
SS-SCF3-VR4-2-P-600: Dual-element inline configuration, VCR, 600 psig, extended service life
SS-SCF3-VO4-P-600: VCO O-ring face seal end connections, 600 psig, panel-mount applications
SS-SCF3-VO4-P-3000: VCO connections, 3,000 psig, high-pressure gas supply lines
SS-SCF3-MM-P-600: Male NPT × male NPT, 600 psig, retrofit into threaded manifold systems
SS-SCF3-FF-P-600: Female VCR × female VCR, 600 psig, inline installation between male-terminated tubing
SS-SCF3-VR4-05-P-600: 0.5 µm sintered element, VCR male × male, 600 psig, bulk gas distribution
SS-SCF3-VR4-2-P-3000: Dual-element, VCR, 3,000 psig, cylinder rack primary filtration
SS-SCF3-VO4-05-P-600: 0.5 µm element, VCO connections, 600 psig, point-of-use gas panels
SS-SCF3-VR4-P-600-EP: Electropolished internal surfaces to Ra ≤ 0.1 µm, VCR, 600 psig, Class 1 cleanroom
SS-SCF3-VR6-P-600: 3/8 in. VCR male × male, 600 psig, higher-flow process gas lines
SS-SCF3-VR6-P-3000: 3/8 in. VCR, 3,000 psig, high-flow cylinder supply
SS-SCF3-VR4-P-600-BV: Integrated bypass valve configuration, VCR, 600 psig, in-situ element replacement
SS-SCF3-VO6-P-600: 3/8 in. VCO connections, 600 psig, high-flow panel distribution
SS-SCF3-VR4-P-600-PG: Integral pressure gauge port, VCR, 600 psig, differential pressure monitoring

Cross-reference SKUs for this product listing: R750B11TCD2GS (OEM assembly reference), 750B11TCD2GG (alternate assembly code), 0100-20358 (Applied Materials / semiconductor OEM part number).

Sourcing Hard-to-Find & Obsolete SS-SCF3 Parts

DriveKNMS maintains an independent inventory of SS-SCF3 series filters and associated components, including configurations that have been discontinued from standard Swagelok distribution channels or carry extended lead times due to supply chain constraints. Our sourcing network covers authorized surplus, OEM pull-outs, and new-old-stock (NOS) units with full traceability documentation.

For semiconductor OEM cross-reference numbers such as 0100-20358 (Applied Materials), R750B11TCD2GS, and 750B11TCD2GG, DriveKNMS provides direct part matching against the Swagelok base model, enabling procurement teams to source replacements without requiring OEM-specific supply agreements. All units are supplied with material certifications (MTRs) and, where applicable, original manufacturer certificates of conformance.

Lead time for standard SS-SCF3 configurations is typically 1–5 business days from stock. Non-standard or high-pressure variants (P-3000 class) are sourced within 7–14 business days. Emergency same-day dispatch is available for critical process shutdowns.

Quality Control for the SS-SCF3 Range

Each SS-SCF3 unit processed through DriveKNMS undergoes a structured inspection protocol prior to dispatch. Visual inspection covers body integrity, VCR gland surface condition, and filter element seating. Pressure testing is conducted at 1.5× rated working pressure using dry nitrogen, with leak detection performed using calibrated helium mass spectrometer equipment to a sensitivity of 1×10⁻⁹ std cc/sec.

For units with electropolished internal surfaces, surface roughness verification is performed using profilometry to confirm Ra values remain within specification. Filter element integrity is verified by bubble point testing per ASTM F316 procedures. All test records are retained and supplied with shipment documentation upon request.

Units sourced from OEM surplus channels are additionally subjected to dimensional verification of VCR gland geometry per Swagelok MS-01-140 specification to confirm compatibility with standard VCR nuts and front ferrules.