Applied Materials RF Inner Coil 0050-04414 / 0161-31275 / H21-03118 / M-832HG-S / 1139039

Technical Dossier

Product Details And Specifications

Applied Materials RF Inner Coil Series: Comprehensive Module Range and Technical Overview

The Applied Materials (AMAT) RF Inner Coil assembly — cross-referenced under part numbers 0050-04414, 0161-31275, H21-03118, M-832HG-S, and 1139039 — is a critical consumable and replacement component used in inductively coupled plasma (ICP) and capacitively coupled plasma (CCP) process chambers. These coils are installed across AMAT's Producer, Centura, DPS (Decoupled Plasma Source), and AdvantEdge platform families, which are deployed globally in semiconductor fabs, flat-panel display manufacturing lines, and advanced packaging facilities.

AMAT RF coil assemblies are integral to wafer-level deposition (CVD, PVD) and etch processes. Their operational integrity directly affects plasma uniformity, etch rate consistency, and thin-film deposition quality. Facilities operating at 200mm and 300mm wafer nodes — including logic, DRAM, NAND, and foundry fabs — maintain these components as critical line-replaceable units (LRUs) with defined preventive maintenance (PM) intervals.

The Evolution of Applied Materials RF Coil Architecture

Applied Materials introduced inductively coupled RF coil technology into its etch and CVD platforms beginning in the early 1990s with the Centura mainframe. The original coil designs were single-turn copper assemblies optimized for 200mm chamber geometries. As process nodes scaled below 130nm, plasma uniformity requirements tightened, driving the transition to multi-turn, segmented coil configurations with improved impedance matching.

The DPS (Decoupled Plasma Source) chamber generation, introduced in the late 1990s, separated the RF source power (delivered via the top coil) from the RF bias power (applied to the wafer chuck), enabling independent control of ion density and ion energy. This architectural shift required a new class of RF coil assemblies with tighter dimensional tolerances and higher thermal stability. Part numbers in the 0050-04414 / 0161-31275 family represent this DPS-era coil generation.

Subsequent platform generations — including the Producer SE, Producer GT, and Centura Silvia — introduced ceramic-encapsulated coil variants and water-cooled coil assemblies to address thermal management at higher RF power levels (up to 3000W source power). Compatibility between coil generations is chamber-specific; substitution across platform families requires engineering validation.

Many coil assemblies in this product family have reached end-of-manufacture (EOM) status from AMAT's factory spare parts program, making third-party sourcing and refurbished inventory the primary supply channel for installed-base maintenance.

Applied Materials RF Coil Full Catalog & Functionalities (SKU List)

The following part numbers represent the RF coil and related plasma source component ecosystem across AMAT's DPS, Centura, and Producer chamber platforms. Each entry reflects a distinct form, fit, or function specification:

0050-04414: RF inner coil assembly, DPS chamber, primary plasma source component
0161-31275: RF inner coil sub-assembly, alternate vendor cross-reference for 0050-04414
H21-03118: RF coil housing/bracket assembly, DPS etch chamber
M-832HG-S: RF coil material grade designation, high-purity copper alloy variant
1139039: OEM internal reference number, coil winding sub-component
0050-09951: RF outer coil assembly, DPS chamber, secondary plasma distribution ring
0050-09952: RF outer coil assembly, 300mm DPS chamber variant
0021-22261: Coil cover plate, quartz, DPS ICP source
0021-22262: Coil cover plate, alumina ceramic, high-power variant
0050-76067: RF coil assembly, Centura DPS II chamber
0050-76068: RF coil assembly, Centura DPS II, 200mm configuration
0190-09828: RF match network coil interconnect, DPS source
0050-57980: Inductive coil assembly, Producer CVD chamber, top electrode variant
0050-57981: Inductive coil assembly, Producer SE, extended-life variant
0050-38686: RF coil assembly, AdvantEdge Mesa etch chamber
0050-38687: RF coil assembly, AdvantEdge G3, 300mm platform
0050-92010: Coil assembly, Centura Silvia CVD, water-cooled configuration
0050-92011: Coil assembly, Centura Silvia, ceramic-encapsulated variant
0021-38120: Quartz dome assembly, DPS chamber, coil interface component
0050-04415: RF inner coil assembly, DPS chamber, next-generation replacement for 0050-04414

Sourcing Hard-to-Find & Obsolete Applied Materials RF Coil Parts

A significant portion of the RF coil assemblies listed above have been discontinued from Applied Materials' active spare parts catalog. AMAT's standard end-of-life (EOL) policy typically provides a final-buy window of 12–24 months after EOM notification, after which factory supply is terminated. For fabs operating legacy Centura and DPS chambers beyond their original design life — a common scenario in mature-node and specialty process facilities — third-party sourcing is the only viable supply path.

DriveKNMS maintains a dedicated inventory program for AMAT RF coil assemblies, including new-surplus, refurbished, and cross-referenced equivalent units. Our sourcing network covers original AMAT factory stock, authorized distributor excess inventory, and decommissioned fab equipment. For part numbers confirmed as obsolete (including 0050-04414 and related cross-references), DriveKNMS provides:

• Inventory availability checks within 24 hours
• Condition grading (new-surplus, refurbished-tested, used-as-removed)
• Cross-reference validation against chamber-specific BOM revisions
• Long-term supply agreements for high-volume PM programs

Quality Control for the Applied Materials RF Coil Range

RF coil assemblies present specific inspection and functional test requirements due to their role in plasma generation and their exposure to process chemistry, thermal cycling, and RF power stress. DriveKNMS applies the following verification protocol to all RF coil units prior to shipment:

• Dimensional inspection: Coil geometry (turn count, pitch, inner/outer diameter) verified against OEM drawing specifications using CMM measurement
• Electrical continuity and resistance: DC resistance measured and compared to OEM specification; open-circuit and short-circuit faults detected
• Impedance characterization: RF impedance measured at 13.56 MHz and 2 MHz (where applicable) using a network analyzer to confirm match network compatibility
• Visual and surface inspection: Coil surface examined for arc damage, deposition buildup, corrosion, and mechanical deformation under 10x magnification
• Dielectric integrity: Coil-to-ground isolation resistance verified for ceramic-encapsulated and coated variants
• Thermal cycling validation: Refurbished units subjected to accelerated thermal cycling to screen for latent solder joint or connection failures

All test data is documented and available upon request with each shipment.

For sourcing inquiries, BOM cross-references, or long-term supply agreements for Applied Materials RF coil assemblies:

© 2026 DriveKNMS. All trademarks belong to their respective owners. Specifications are for reference only and subject to change without notice. Verify all parameters against official documentation before installation.