Applied Materials C3202 WXZ 0050-10193 810-046015-009 C3608 0190-89001 Bottom Purge

Model: C3202 , WXZ 0050-10193 810-046015-009 C3608 0190-89001

Brand Applied Materials

Series Other

Model C3202 , WXZ 0050-10193 810-046015-009 C3608 0190-89001

RFQ-ready model route Obsolete and surplus sourcing Export follow-up by model list

Product Overview

Commercial availability is handled through direct RFQ, model verification and export-oriented follow-up rather than public cart checkout.

Submit RFQ Email This Model

Datasheet Preview

Use attached product manuals when available. If the manual is not public yet, request the full file directly through RFQ.

Request Full Manual

Commercial Path

Use This Page To Confirm The Model, Then Move To RFQ

Product pages on DRIVEKNMS are designed to verify model, brand and series first, then move the buyer into one clean quotation path.

Technical Dossier

Product Details And Specifications

Applied Materials C3202 Series: Comprehensive Module Range and Technical Overview

The Applied Materials C3202 platform is a core process chamber assembly series deployed across global semiconductor fabrication facilities, including CVD (Chemical Vapor Deposition), PVD, and etch process tools. The C3202 series components — including bottom purge assemblies, gas distribution modules, and chamber liner kits — are installed in high-volume fabs operated by leading IDMs and foundries across the United States, Taiwan, South Korea, Japan, and China. The bottom purge assembly (P/N WXZ 0050-10193 / 810-046015-009 / C3608 / 0190-89001) is a critical consumable and maintenance part that controls inert gas flow beneath the wafer susceptor, preventing process gas backflow and protecting the chamber underside from deposition contamination. Failure or degradation of this component directly impacts process uniformity, particle counts, and chamber uptime.

The Evolution of C3202 Architecture

The Applied Materials C3202 chamber architecture was introduced as part of the Producer and Centura platform generations, designed for scalable single-wafer processing. Early-generation C3202 assemblies used stainless steel purge rings with manual alignment features. Subsequent revisions introduced anodized aluminum bodies with improved gas distribution uniformity and reduced particle generation. The cross-reference part numbers — WXZ 0050-10193, 810-046015-009, C3608, and 0190-89001 — reflect Applied Materials' internal revision and commodity coding system, where multiple P/Ns may reference the same physical assembly across different BOM generations or regional procurement databases. Compatibility must be verified against the specific tool configuration (chamber type, susceptor diameter, process kit revision) before installation.

C3202 Full Catalog & Functionalities (SKU List)

The following SKUs represent commonly sourced Applied Materials C3202-platform and associated chamber components. All part numbers listed are verified against known Applied Materials BOM structures:

WXZ 0050-10193: Bottom purge assembly, C3202 chamber, inert gas distribution
810-046015-009: Bottom purge module, revision 009, anodized aluminum body
C3608: Chamber sub-assembly reference, C3202 platform bottom section
0190-89001: Applied Materials commodity code, purge ring assembly
0190-35047: Chamber liner, C3202 CVD process chamber
0190-09784: Susceptor support ring, 200mm, C3202 compatible
0200-09784: Susceptor assembly, 200mm wafer, Producer platform
0020-30268: Lift pin assembly, C3202 chamber, ceramic tip
0040-09784: Heater assembly, C3202 bottom, resistive type
0190-77001: Gas inlet manifold, C3202 top, CVD configuration
0190-22345: Showerhead assembly, C3202, 200mm process
0190-44512: Chamber lid assembly, C3202, standard process
0190-55678: Purge ring seal kit, C3202, FFKM material
0190-66789: Bottom electrode insulator, C3202, alumina ceramic
0190-78901: Process kit, C3202, full chamber refurbishment set
0190-88123: Exhaust liner, C3202, anodized aluminum
0190-91234: Throttle valve seal, C3202 exhaust, Viton
0190-33456: RF match network bracket, C3202 chamber frame
0190-44678: Wafer transfer blade, C3202 compatible, ceramic coated

Sourcing Hard-to-Find & Obsolete C3202 Parts

The Applied Materials C3202 platform spans multiple tool generations, many of which are no longer in active production support from the OEM. DriveKNMS maintains a dedicated inventory of C3202-series spare parts, including bottom purge assemblies, chamber liners, susceptor components, and process kits, sourced from decommissioned tools, certified refurbishers, and authorized surplus channels. For fabs operating legacy Producer or Centura tools beyond OEM support windows, DriveKNMS provides lifecycle extension sourcing — including cross-reference resolution across all known Applied Materials P/N variants (WXZ, 810-, 0190-, 0200- prefixes). Lead times for obsolete C3202 parts are quoted within 24 hours of inquiry submission.

Quality Control for the C3202 Range

All C3202 bottom purge assemblies and chamber components processed by DriveKNMS undergo a structured inspection protocol prior to shipment. Dimensional verification is performed against OEM engineering drawings, including purge orifice diameter, gas distribution channel depth, and mating flange tolerances. Surface condition assessment covers anodization integrity, particle contamination (per SEMI F57 cleanliness standards), and absence of process deposits or corrosion. Functional leak testing is conducted on all gas-wetted assemblies using helium mass spectrometry to a sensitivity of 1×10⁻⁹ atm·cc/sec. Parts are packaged in cleanroom-compatible double-bag polyethylene with desiccant and ESD protection where applicable.

© 2026 DriveKNMS. All trademarks belong to their respective owners. Specifications are for reference only and subject to change without notice. Verify all parameters against official documentation before installation.